DIRECTED GAS INJECTION APPARATUS FOR SEMICONDUCTOR PROCESSING

Details for Australian Patent Application No. 2002351692 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors STRANG, Eric, J.

Pub. Number AU-A-2002351692

PCT Number PCT/US02/16584

PCT Pub. Number WO2003/003414

Priority 60/301,436 29.06.01 US

Filing date 20 June 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 60/301,436 29.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002351692

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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