A METHOD OF SELECTIVELY ALLOYING INTERCONNECT REGIONS BY DEPOSTION PROCESS

Details for Australian Patent Application No. 2002350839 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors BESSER, Paul, R.; ZHAO, Larry

Pub. Number AU-A-2002350839

PCT Number PCT/US02/12773

PCT Pub. Number WO2003/001589

Priority 09/884,027 20.06.01 US

Filing date 2 April 2002

Wipo publication date 8 January 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 09/884,027 20.06.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002350839

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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