METHOD FOR MAKING THIN LAYERS CONTAINING MICROCOMPONENTS

Details for Australian Patent Application No. 2002350826 (hide)

Owner S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventors LAGAHE, Chrystelle; GHYSELEN, Bruno; ASPAR, Bernard

Pub. Number AU-A-2002350826

PCT Number PCT/FR02/03422

PCT Pub. Number WO2003/032384

Priority 01/13105 11.10.01 FR

Filing date 8 October 2002

Wipo publication date 22 April 2003

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 01/13105 11.10.01 FR

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002350826

1 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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