METHOD FOR MAKING A THIN LAYER COMPRISING ALL OR PART OF COMPONENT(S) AND/OR OF CIRCUIT(S)

Details for Australian Patent Application No. 2002350823 (hide)

Owner COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventors ZUSSY, Marc; CLERC, Jean-Frederic; ASPAR, Bernard

Pub. Number AU-A-2002350823

PCT Number PCT/FR02/03408

PCT Pub. Number WO2003/032383

Priority 01/12955 09.10.01 FR

Filing date 7 October 2002

Wipo publication date 22 April 2003

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 March 2003 Complete Application Filed

  Priority application(s): 01/12955 09.10.01 FR

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002350823

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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