Owner Solar Systems & Equipments S.R.L.

Inventors Bosio, Alessio; Romeo, Alessandro; Romeo, Nicola

Agent Davies Collison Cave

Pub. Number AU-B-2002349822

PCT Number PCT/IT02/00634

PCT Pub. Number WO2003/032406

Priority LU2001A000011 17.10.01 IT; LU2001A000008 05.10.01 IT; LU2001A000012 17.10.01 IT

Filing date 4 October 2002

Wipo publication date 22 April 2003

Acceptance publication date 15 November 2007

H01L 21/20 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 14/06 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 14/58 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - After-treatment

H01L 21/363 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/477 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/04 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - adapted as conversion devices