ELECTROSTATIC CLAMPLESS HOLDER MODULE AND COOLING SYSTEM

Details for Australian Patent Application No. 2002349752 (hide)

Owner TOTO LTD. ANELVA CORPORATION CHOSHU INDUSTRY CO., LTD.

Inventors SAGO, Yasumi; TATENO, Noriaki; TAMARU, Masahiko; IKEMURA, Yoshiyuki; HIRAYAMA, Tadashi; TAKAMURA, Tomio; KANEKO, Kazuaki; IKEDA, Masayoshi; MIYAJI, Jun

Pub. Number AU-A-2002349752

PCT Number PCT/JP02/12658

PCT Pub. Number WO2003/049180

Priority 2001-369957 04.12.01 JP

Filing date 3 December 2002

Wipo publication date 17 June 2003

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B21J 005/00 Methods for forging, hammering, or pressing

B22F 003/24 Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering - After-treatment of workpieces or articles

B22F 003/17 Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 2001-369957 04.12.01 JP

21 August 2003 Application Open to Public Inspection

  Published as AU-A-2002349752

19 August 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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