ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD

Details for Australian Patent Application No. 2002349532 (hide)

Owner NIKON CORPORATION

Inventors KUDO, Yuji

Pub. Number AU-A-2002349532

PCT Number PCT/JP02/11406

PCT Pub. Number WO2003/041134

Priority 2001/341337 07.11.01 JP

Filing date 31 October 2002

Wipo publication date 19 May 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

13 March 2003 Complete Application Filed

  Priority application(s): 2001/341337 07.11.01 JP

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002349532

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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