OPTICAL ARRANGEMENT AND METHOD OF SPECIFYING AND PERFORMING A DEFORMATION OF AN OPTICAL SURFACE OF AN OPTICAL ELEMENT BEING PART OF THE OPTICAL ARRANGEMENT

Details for Australian Patent Application No. 2002346911 (hide)

Owner Carl Zeiss SMT AG

Inventors FEHR, Jean-Noel; FROMMEYER, Andreas

Pub. Number AU-A-2002346911

PCT Number PCT/EP02/11492

PCT Pub. Number WO2004/036316

Filing date 15 October 2002

Wipo publication date 4 May 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G02B 017/06 Systems with reflecting surfaces, with or without refracting elements

Event Publications

13 March 2003 Complete Application Filed

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2002346911

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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