RESIST COMPOSITIONS

Details for Australian Patent Application No. 2002346197 (hide)

Owner WAKO PURE CHEMICAL INDUSTRIES, LTD.

Inventors URANO, Fumiyoshi; MAESAWA, Tsuneaki

Pub. Number AU-A-2002346197

PCT Number PCT/JP02/06218

PCT Pub. Number WO2003/007079

Priority 2001-189003 22.06.01 JP

Filing date 21 June 2002

Wipo publication date 29 January 2003

International Classifications

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 2001-189003 22.06.01 JP

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002346197

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002346198-PROCESS FOR PRODUCING PLANT EXTRACT CONTAINING PLANT POWDER

2002346196-Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus