INTERFEROMETRY SYSTEM AND METHOD EMPLOYING AN ANGULAR DIFFERENCE IN PROPAGATION BETWEEN ORTHOGONALLY POLARIZED INPUT BEAM COMPONENTS

Details for Australian Patent Application No. 2002345914 (hide)

Owner ZYGO CORPORATION

Inventors DE GROOT, Peter, J.; HILL, Henry, A.

Pub. Number AU-A-2002345914

PCT Number PCT/US02/20264

PCT Pub. Number WO2003/004966

Priority 60/303,299 06.07.01 US; 60/322,950 17.09.01 US; 10/174,149 17.06.02 US

Filing date 26 June 2002

Wipo publication date 21 January 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

6 March 2003 Complete Application Filed

  Priority application(s): 60/303,299 06.07.01 US; 60/322,950 17.09.01 US; 10/174,149 17.06.02 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002345914

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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