OPTICAL ELEMENT, METHOD OF MANUFACTURING THE OPTICAL ELEMENT, OPTICAL SYSTEM, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING MICRO DEVICE

Details for Australian Patent Application No. 2002344629 (hide)

Owner NIKON CORPORATION

Inventors SHIBAZAKI, Yuichi

Pub. Number AU-A-2002344629

PCT Number PCT/JP02/11478

PCT Pub. Number WO2003/040785

Priority 2001-341932 07.11.01 JP

Filing date 1 November 2002

Wipo publication date 19 May 2003

International Classifications

G02B 005/30 Optical elements other than lenses - Polarising elements

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 007/02 Mountings, adjusting means, or light-tight connections, for optical elements - for lenses

G02B 007/00 Mountings, adjusting means, or light-tight connections, for optical elements

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 2001-341932 07.11.01 JP

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002344629

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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