SUSCEPTOR WITH EPITAXIAL GROWTH CONTROL DEVICES AND EPITAXIAL REACTOR USING THE SAME

Details for Australian Patent Application No. 2002339537 (hide)

Owner LPE SPA

Inventors PRETI, Franco; YARLAGADDA, Srinivas

Pub. Number AU-A-2002339537

PCT Number PCT/EP02/10043

PCT Pub. Number WO2003/023093

Priority MI2001A001881 07.09.01 IT

Filing date 5 September 2002

Wipo publication date 24 March 2003

International Classifications

C30B 025/12 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Substrate holders or susceptors

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): MI2001A001881 07.09.01 IT

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002339537

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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