METHOD AND DEVICE FOR THE THERMAL TREATMENT OF SUBSTRATES

Details for Australian Patent Application No. 2002339524 (hide)

Owner MATTSON THERMAL PRODUCTS GMBH

Inventors HAUF, Markus; STRIEBEL, Christoph

Pub. Number AU-A-2002339524

PCT Number PCT/EP02/05683

PCT Pub. Number WO2002/095804

Priority 101 25 318.4 23.05.01 DE; 102 22 879.5 23.05.02 DE

Filing date 23 May 2002

Wipo publication date 3 December 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/48 Chemical deposition or plating by decomposition - by irradiation, e.g. photolysis, radiolysis, particle radiation

H05B 003/00 Ohmic-resistance heating

C30B 031/12 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

G01J 005/06 Radiation pyrometry - Arrangements for eliminating effects of disturbing radiation

Event Publications

27 February 2003 Complete Application Filed

  Priority application(s): 101 25 318.4 23.05.01 DE; 102 22 879.5 23.05.02 DE

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002339524

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002339525-DEVICE FOR MONITORING COAGULATION STATUS

2002339523-METHOD AND DEVICES FOR CONTROLLING RETRANSMISSIONS IN DATA STREAMING