TRANSPORT BOX FOR OPTICAL MASKS

Details for Australian Patent Application No. 2002338441 (hide)

Owner ACR AUTOMATION IN CLEANROOM GMBH

Inventors DECLERCQ, Daniel; JAGER, Felix; KRUGER-VELTHUSEN, Eva

Pub. Number AU-A-2002338441

PCT Number PCT/EP02/04305

PCT Pub. Number WO2002/086949

Priority 201 06 909.1 21.04.01 DE

Filing date 18 April 2002

Wipo publication date 5 November 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 201 06 909.1 21.04.01 DE

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002338441

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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