METHOD AND APPARATUS FOR FORMING FILM

Details for Australian Patent Application No. 2002338200 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors OHTA, Tomohiro; MIYOSHI, Hidenori; SUGIURA, Masahito; KASHIWAGI, Yusaku; KAGAWA, Yoshihisa

Pub. Number AU-A-2002338200

PCT Number PCT/JP02/08819

PCT Pub. Number WO2003/019645

Priority 2001-261443 30.08.01 JP

Filing date 30 August 2002

Wipo publication date 10 March 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 2001-261443 30.08.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002338200

17 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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