COMBINED PLASMA/LIQUID CLEANING OF SUBSTRATES

Details for Australian Patent Application No. 2002336269 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors SELWYN, Gary, S.; HENINS, Ivars

Pub. Number AU-A-2002336269

PCT Number PCT/US02/07068

PCT Pub. Number WO2002/072286

Priority 09/803,065 12.03.01 US

Filing date 7 March 2002

Wipo publication date 24 September 2002

International Classifications

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

B08B 003/02 Cleaning by methods involving the use or presence of liquid or steam - Cleaning by the force of jets or sprays

B08B 003/04 Cleaning by methods involving the use or presence of liquid or steam - Cleaning involving contact with liquid

B08B 005/00 Cleaning by methods involving the use of air flow or gas flow

B08B 005/02 Cleaning by methods involving the use of air flow or gas flow - Cleaning by the force of jets, e.g. blowing-out cavities

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

B08B 007/04 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by a combination of operations

Event Publications

20 February 2003 Complete Application Filed

  Priority application(s): 09/803,065 12.03.01 US

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002336269

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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