METHOD FOR FORMING IMAGE THROUGH REACTION DEVELOPMENT

Details for Australian Patent Application No. 2002335208 (hide)

Owner YOKOHAMA TLO COMPANY, LTD.

Inventors TOMOI, Masao; FUKUSHIMA, Takafumi; ITATANI, Hiroshi

Pub. Number AU-A-2002335208

PCT Number PCT/JP02/10396

PCT Pub. Number WO2003/032091

Priority 2001-309500 05.10.01 JP

Filing date 4 October 2002

Wipo publication date 22 April 2003

International Classifications

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

G03F 007/30 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Imagewise removal using liquid means

G03F 007/32 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Liquid compositions therefor, e.g. developers

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

13 February 2003 Complete Application Filed

  Priority application(s): 2001-309500 05.10.01 JP

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2002335208

24 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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