COMPOSITION FOR ACTINIC ENERGY RAY AND METHOD OF FORMING PATTERN

Details for Australian Patent Application No. 2002330510 (hide)

Owner KANSAI PAINT CO., LTD.

Inventors IWASHIMA, Chiaki; IMAI, Genji; HASEGAWA, Takeya

Pub. Number AU-A-2002330510

PCT Number PCT/JP02/09185

PCT Pub. Number WO2003/025674

Priority 2001-275244 11.09.01 JP; 2001-275245 11.09.01 JP

Filing date 10 September 2002

Wipo publication date 1 April 2003

International Classifications

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

G03F 007/004 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C08L 101/06 Compositions of unspecified macromolecular compounds

C08F 291/00 Macromolecular compounds obtained by polymerising monomers on to macromolecular compounds according to more than one of the groups

Event Publications

30 January 2003 Complete Application Filed

  Priority application(s): 2001-275244 11.09.01 JP; 2001-275245 11.09.01 JP

5 June 2003 Application Open to Public Inspection

  Published as AU-A-2002330510

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002330511-Semiconductor calculation device

2002330509-INOSINIE/L-ARGININE SALT AND USE THEREOF