DEPOSITION METHOD OF INSULATING LAYERS HAVING LOW DIELECTRIC CONSTANT OF SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2002319930 (hide)

International Classifications

Event Publications

16 January 2003 Complete Application Filed

Priority application(s): 2002-0027413 17.05.02 KR

29 January 2004 Application Open to Public Inspection

Published as AU-A-2002319930

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 August 2005 Corrigenda

Applications OPI - Name Index Under the name SAMSUNG ELECTRONICS CO., LTD., Application No. 2002319930, under INID (71) correct the name to read SAMSUNG ELECTRONICS CO., LTD.; DOW CORNING CORPORATION

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