PHASE-SHIFTING DIFFRACTION GRATING INTERFEROMETER AND ITS MEASURING METHOD

Details for Australian Patent Application No. 2002319925 (hide)

Owner KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventors KIM, Seung-Woo; HWANG, Tae-joon

Pub. Number AU-A-2002319925

PCT Number PCT/KR02/01331

PCT Pub. Number WO2004/003467

Priority 2002/36183 27.06.02 KR

Filing date 15 July 2002

Wipo publication date 19 January 2004

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 2002/36183 27.06.02 KR

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2002319925

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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