PROCESS AND APPARATUS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER

Details for Australian Patent Application No. 2002319679 (hide)

Owner SEMITOOL, INC.

Inventors KENNY, Michael; AEGETER, Brian; BERGMAN, Eric; SCRANTON, Dana

Pub. Number AU-A-2002319679

PCT Number PCT/US02/23515

PCT Pub. Number WO2003/015146

Priority 09/925,884 06.08.01 US

Filing date 23 July 2002

Wipo publication date 24 February 2003

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 006/00 Cleaning by electrostatic means

Event Publications

16 January 2003 Complete Application Filed

  Priority application(s): 09/925,884 06.08.01 US

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002319679

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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