LARGE-AREA PLASMA ANTENNA(LAPA) AND PLASMA SOURCE FOR MAKING UNIFORM PLASMA

Details for Australian Patent Application No. 2002313924 (hide)

Owner SEM TECHNOLOGY CO., LTD.

Inventors KIM, Gon-Ho

Pub. Number AU-A-2002313924

PCT Number PCT/KR02/01364

PCT Pub. Number WO2003/017738

Priority 2001-0043856 20.07.01 KR

Filing date 20 July 2002

Wipo publication date 3 March 2003

International Classifications

H05H 001/24 Generating plasma - Generating plasma

Event Publications

2 January 2003 Complete Application Filed

  Priority application(s): 2001-0043856 20.07.01 KR

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002313924

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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