METHOD AND APPARATUS FOR REMOVING A REACTION BY-PRODUCT IN THE SEMICONDUCTOR AND THE LIQUID CRYSTAL DISPLAY MANUFACTURED FIELD

Details for Australian Patent Application No. 2002311331 (hide)

Owner KIM, Tae-Gon

Inventors KIM, Tae-Gon

Pub. Number AU-A-2002311331

PCT Number PCT/KR02/01096

PCT Pub. Number WO2003/005428

Priority 2001-0034867 14.06.01 KR; 2002-0032372 10.06.02 KR

Filing date 11 June 2002

Wipo publication date 21 January 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001-0034867 14.06.01 KR; 2002-0032372 10.06.02 KR

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002311331

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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