METHOD AND APPARATUS FOR CONTROLLING THE SPATIAL TEMPERATURE DISTRIBUTION ACROSS THE SURFACE OF A WORKPIECE SUPPORT

Details for Australian Patent Application No. 2002254708 (hide)

Owner LAM RESEARCH, CORPORATION

Inventors BENJAMIN, Neil; STEGER, Robert

Pub. Number AU-A-2002254708

PCT Pub. Number WO2002/089531

Priority 09/846,432 30.04.01 US; 10/062,395 01.02.02 US

Filing date 23 April 2002

Wipo publication date 11 November 2002

International Classifications

H05B 003/16 Ohmic-resistance heating - the conductor being mounted on an insulating base

H05B 003/44 Ohmic-resistance heating

H05B 003/68 Ohmic-resistance heating - Heating arrangements specially adapted for cooking plates or analogous hot-plates

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002254708

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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