ELECTRODE CONFIGURATION FOR EXTREME-UV ELECTRICAL DISCHARGE SOURCE

Details for Australian Patent Application No. 2002243405 (hide)

Owner EUV LIMITED LIABILITY CORPORATION

Inventors SPENCE, Paul, A.; FORNACIARI, Neal, R.; CHANG, Jim, Jihchyun

Pub. Number AU-A-2002243405

PCT Pub. Number WO2002/074022

Priority 09/808,587 13.03.01 US

Filing date 12 December 2001

Wipo publication date 24 September 2002

International Classifications

H05G 002/00 Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002243405

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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