APPARATUS FOR PELLICLE REMOVE

Details for Australian Patent Application No. 2002243047 (hide)

Owner KIM, Sang-Duck

Inventors KIM, Sang-Duck

Pub. Number AU-A-2002243047

PCT Pub. Number WO2003/007352

Priority 2001/21072 U 11.07.01 KR

Filing date 25 March 2002

Wipo publication date 29 January 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002243047

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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