OPTICAL SYSTEM MANUFACTURING METHOD AND EXPOSURE DEVICE HAVING AN OPTICAL SYSTEM MANUFACTURED BY THE MANUFACTURING METHOD

Details for Australian Patent Application No. 2002242976 (hide)

Owner NIKON CORPORATION

Inventors TANIMOTO, Akikazu

Pub. Number AU-A-2002242976

PCT Pub. Number WO2002/077692

Priority 2001-89242 27.03.01 JP

Filing date 26 March 2002

Wipo publication date 8 October 2002

International Classifications

G02B 007/02 Mountings, adjusting means, or light-tight connections, for optical elements - for lenses

G02B 001/10 Optical elements characterised by the material of which they are made - Optical coatings produced by application to, or surface treatment of, optical elements

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002242976

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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