METHODS AND APPARATUS FOR FORMING PRECURSORS

Details for Australian Patent Application No. 2002242902 (hide)

Owner TRIKON HOLDINGS LIMITED

Inventors MACNEIL, John

Pub. Number AU-A-2002242902

PCT Pub. Number WO2002/081772

Priority 0108782.4 07.04.01 GB

Filing date 4 April 2002

Wipo publication date 21 October 2002

International Classifications

C23C 016/448 Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002242902

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002242903-IMPROVEMENTS IN FLUID DISPENSING SYSTEMS

2002242901-MICRO WIRES AND PROCESS FOR THEIR PREPARATION