METHOD FOR FORMATION OF TITANIUM NITRIDE FILMS

Details for Australian Patent Application No. 2002236383 (hide)

Owner RAMOS, Henry, J. PHILIPPINE COUNCIL FOR ADVANCED SCIENCE AND TECHNOLOGY RESEARCH AND DEVELOPMENT UNIVERSITY OF THE PHILIPPINES DILIMAN

Inventors RAMOS, Henry, J.

Pub. Number AU-A-2002236383

PCT Pub. Number WO2003/074755

Filing date 27 February 2002

Wipo publication date 16 September 2003

International Classifications

C23C 014/32 Coating by vacuum evaporation, by sputtering or by ion implantation - by explosion

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

Event Publications

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2002236383

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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