TEMPERATURE MEASURING METHOD AND APPARATUS AND SEMICONDUCTOR HEAT TREATMENT APPARATUS

Details for Australian Patent Application No. 2002236219 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors SUZUKI, Tomohiro

Pub. Number AU-A-2002236219

PCT Pub. Number WO2002/075264

Priority 2001-062600 06.03.01 JP

Filing date 5 March 2002

Wipo publication date 3 October 2002

International Classifications

G01J 005/00 Radiation pyrometry

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002236219

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002236220-Method of controlling absolute humidity of air stream in kilning step and kilning apparatus

2002236218-ABSORBENT FOR PLANAR POLYCYCLIC AROMATIC COMPOUND