IMPROVED METHOD FOR PREPARING SEMICONDUCTOR WAFER FOR DEFECT ANALYSIS

Details for Australian Patent Application No. 2002217415 (hide)

Owner SELA SEMICONDUCTOR ENGINEERING LABORATORIES LTD.

Inventors SMITH, Colin; BUGUSLAVSKY, Dima

Pub. Number AU-A-2002217415

PCT Pub. Number WO2002/054042

Priority 140712 03.01.01 IL

Filing date 3 January 2002

Wipo publication date 16 July 2002

International Classifications

G01N 001/28 Sampling - Preparing specimens for investigation

G01N 023/04 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002217415

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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