METHOD FOR FORMING A MICROPATTERN ON A SUBSTRATE BY USING CAPILLARY FORCE

Details for Australian Patent Application No. 2001292397 (hide)

Owner MINUTA TECHNOLOGY CO., LTD.

Inventors YOO, Pil Jin; LEE, Hong Hie; SUH, Kab Yang; KIM, Youn Sang

Pub. Number AU-A-2001292397

PCT Pub. Number WO2003/035932

Filing date 25 September 2001

Wipo publication date 6 May 2003

International Classifications

C23C 026/00 Coating not provided for in groups

C23C 028/00 Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and or

Event Publications

3 July 2003 Application Open to Public Inspection

  Published as AU-A-2001292397

10 June 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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