ARC EVAPORATOR WITH A POWERFUL MAGNETIC GUIDE FOR TARGETS HAVING A LARGE SURFACE AREA

Details for Australian Patent Application No. 2001242534 (hide)

Owner FUNDACION TEKNIKER

Inventors GOIKOETXEA LARRINAGA, Josu

Pub. Number AU-A-2001242534

PCT Pub. Number WO2002/077318

Filing date 27 March 2001

Wipo publication date 8 October 2002

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2001242534

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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